LAM Research 605‑109114‑004 VME Single‑Board Computer (GE V7668A) 4‑Port Gigabit Ethernet Controller Board

Description

LAM Research 605‑109114‑004 VME Single‑Board Computer (GE V7668A) 4‑Port Gigabit Ethernet Controller Board

Product Details

The 605‑109114‑004 is a VME‑bus single‑board computer (SBC) integrated with GE V7668A hardware core, customized OEM assembly for LAM Research semiconductor etch & deposition platforms. Origin: USA. Lifecycle status: EOL discontinued, no brand‑new OEM supply; market stock mainly consists of NOS surplus and fully tested refurbished units for fab maintenance projects.

This VME SBC is equipped with onboard processor, memory, flash storage and four‑port gigabit Ethernet. It undertakes host‑level equipment computation, process task scheduling, inter‑board high‑speed network communication, equipment status monitoring and fault log storage within the tool VME chassis. It runs dedicated LAM equipment firmware; hardware revision, firmware version, memory configuration must be strictly verified before replacement, different revisions are not fully interchangeable. Installed in standard VME 6U slot, powered by VME backplane.

Applications

‑ Main host VME CPU board for LAM etch and dielectric process platforms ‑ Wafer fab semiconductor equipment controller spare‑part replacement ‑ Legacy LAM process tool maintenance, refurbishment and upgrade ‑ Equipment host task scheduling and multi‑board high‑speed network interconnection ‑ Fab spare‑part inventory for old‑generation LAM semiconductor production tools ‑ VME‑based semiconductor system control cabinet reconstruction

LAM 605-109114-004

Related Series Models (6+)

1. 605‑109114‑001
2. 605‑109114‑002
3. 605‑109114‑003
4. 810‑800256‑207
5. 810‑028295‑173
6. 605‑024335‑000
7. 605‑110254‑001

Key Features

1. 6U VME‑bus single‑board computer customized for LAM semiconductor equipment, based on GE V7668A architecture.
2. Integrated 4‑port Gigabit Ethernet interface for high‑speed deterministic data exchange between host and chamber node boards.
3. Onboard processor, RAM and flash memory for equipment operating system, process configuration and fault event log storage.
4. VME backplane communication interface, realizes data interaction with other VME peripheral boards inside the chassis.
5. Multiple hardware revisions exist; revision, firmware and memory configuration must match the original tool before installation.
6. Comprehensive onboard self‑diagnosis, monitors CPU, memory, Ethernet and VME bus status.
7. Manufactured in USA, proprietary OEM assembly for semiconductor tools, EOL obsolete.
8. Only available as NOS or fully tested refurbished spare‑parts for existing production tools.

LAM 605-109114-004

Main Functions

1. Acts as main host controller, executes equipment‑level task scheduling and process sequence logic for LAM process tool.
2. Realizes high‑speed data transmission via four‑port gigabit Ethernet, communicates with chamber node boards and other peripheral assemblies.
3. Stores equipment system firmware, hardware configuration parameters and runtime fault logs for maintenance traceability.
4. Implements bidirectional data exchange with each VME slot module through VME bus protocol.
5. Continuously monitors host hardware, network and back‑plane communication health, reports fault alarms.
6. Supports equipment initialization, parameter loading, diagnosis and fault read‑out during tool startup.
7. Coordinates the work of multiple chamber node boards to guarantee stable wafer processing sequence.
8. Serves as core computing unit inside VME chassis for legacy LAM semiconductor etch/deposition equipment.